Unity request for p5000etch
lvereen at unitysemi.com
Thu Nov 3 10:09:05 PDT 2011
There are two materials. They are conductive metal oxides. Their
composition is highly confidential.
The materials have Pr, Co, Mn, La, Sr, Ca. If Mn is a problem, we do not
necessarily have to use that composition.
We would prefer to use a chemical etch ie CF4, CHF3, etc. I doubt the
chlorine based chemistries would work. We may have likely have to use a
larger component of sputter etch ie Ar in the etch.
Given the options open to us, access to the P5000 is very important.
Please let us know your decision as soon as is feasible.
From: Mary Tang [mailto:mtang at stanford.edu]
Sent: Thursday, November 03, 2011 9:41 AM
To: lvereen at unitysemi.com
Cc: specmat at snf.stanford.edu; jbumgarner at snf.stanford.edu; maurice stevens
Subject: Unity request for p5000etch
Hi Lidia --
We've been reviewing your request for etching CMO materials on P5000
based on the info you'd sent last August. The sticking point has been
the Manganese -- but when I spoke with Mary Calarrudo, she said that the
material to be etched was not Cobalt manganese oxide (which I think we'd
assumed "CMO" meant). She says CMO is Complex Metal Oxide.
So, apologies for the delay, but I'm confused. Could we get a
definitive description of the elements in the films you would like
etched in the p5000? As well as some description of the type of process
(chemistry and chamber) you'd like to use? You do not have to disclose
anything proprietary but part of the agreement of working at SNF is
sharing info about composition and processes to the degree other
researchers' work may be affected. So, specific composition is not
needed, but certainly the elemental components would be helpful,
especially if things appear at trace levels.
More information about the specmat