samsung wafers in wbmetal

Kaveh Milaninia kavehm at ece.ucsb.edu
Fri Nov 11 10:34:29 PST 2011


I'd like to see if I can get permission to clean wafers from an outside
source in wbmetal. The wafers are from Samsung and have the following stack
Si Sub/SiO2/Ti/Al/Ti/TiN. The metals are all semiclean and sputter deposited
in their semiconductor foundry. After deposition, the wafers are polished
and cleaned with a PVA pad and di water. No slurry is used.

 

Kaveh

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