samsung wafers in wbmetal

Mahnaz Mansourpour mahnaz at stanford.edu
Fri Nov 11 13:25:52 PST 2011


Hi kaveh,

This is to let you know that  your request is approved.
And if any issue which i do not anticipate one you  can change the 
chemical afterward.

mahnaz

On 11/11/2011 10:34 AM, Kaveh Milaninia wrote:
>
> I'd like to see if I can get permission to clean wafers from an 
> outside source in wbmetal. The wafers are from Samsung and have the 
> following stack Si Sub/SiO2/Ti/Al/Ti/TiN. The metals are all semiclean 
> and sputter deposited in their semiconductor foundry. After 
> deposition, the wafers are polished and cleaned with a PVA pad and di 
> water. No slurry is used.
>
> Kaveh
>
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