samsung wafers in wbmetal
mahnaz at stanford.edu
Fri Nov 11 13:25:52 PST 2011
This is to let you know that your request is approved.
And if any issue which i do not anticipate one you can change the
On 11/11/2011 10:34 AM, Kaveh Milaninia wrote:
> I'd like to see if I can get permission to clean wafers from an
> outside source in wbmetal. The wafers are from Samsung and have the
> following stack Si Sub/SiO2/Ti/Al/Ti/TiN. The metals are all semiclean
> and sputter deposited in their semiconductor foundry. After
> deposition, the wafers are polished and cleaned with a PVA pad and di
> water. No slurry is used.
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