FeCl3 Copper Etch

Ranida Wongpiya ranidaw at stanford.edu
Mon Oct 3 01:29:13 PDT 2011


I'm planing to use copper etch (FeCl3) in the cleanroom. I believe someone has already used and stored this chemical inside before. So, I'm writing to ask what do I have to do to be able to use it. Do I have to fill some documents? 

Thank you so much. 



Ranida Wongpiya 
Graduate Student 
Materials Science and Engineering 
Stanford University 
(650) 391-6660 

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