phosphoric acid and hydrogen peroxide

Kevin Chih-Yao Huang khu834 at stanford.edu
Thu Oct 6 15:06:01 PDT 2011


Hi:

My name is Kevin Huang. Coral ID khu834.
I would like to mix H3PO4:H2O2:H20 in the ratio 2:1:25 for etching GaAs at
room temperature.
I just want to make sure that this is ok.

If this is ok, I would also like to check whether pyrex beakers and
measuring cylinders are fine, or do I have to use teflon beakers.
I will make sure the etched GaAs is collected and disposed via the chemical
pass through.
Thank you.

Kevin
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