Fwd: RE: Pquest chemistry?

Mary Tang mtang at stanford.edu
Wed Oct 19 20:21:16 PDT 2011

Hey SpecMat-ers --

ZnO in Pquest?


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From: 	Mailoa Jonathan (CR/RTC2.1-NA) 
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To: 	Mary Tang <mtang at stanford.edu>
CC: 	eenriquez at snf.stanford.edu <eenriquez at snf.stanford.edu>
Date: 	Thu, 20 Oct 2011 02:44:10 +0200
Subject: 	RE: Pquest chemistry?
Thread-Topic: 	Pquest chemistry?
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Hi Mary,

Thank you very much, this is great!

I currently have ~1um ZnO on quartz wafer, with polystyrene microsphere as the etching mask. If it would be alright to etch this in pquest, can I be trained for it?


-----Original Message-----
From: Mary Tang [mailto:mtang at stanford.edu]
Sent: Wednesday, October 19, 2011 5:41 PM
To: Mailoa Jonathan (CR/RTC2.1-NA)
Cc: eenriquez at snf.stanford.edu
Subject: Re: Pquest chemistry?

Hi Jonathan --

Yes, indeed, the pquest is what you want (although we should have a
couple more to offer you with the new etchers due to arrive in the next
couple of months).

The etch gases are on the wiki, but filed in a way that may not get
found -- at the top of the dry etch folder:



On 10/19/2011 5:36 PM, Mailoa Jonathan (CR/RTC2.1-NA) wrote:
>  Hi Mary and Elmer,
>  I have been trying to find a 'gold-contaminated' chlorine-based etcher in SNF. I am wondering if pquest uses chlorine-based chemistry for its etching process? What are the available gas?
>  I have been trying to find what the etching gas is in SNF wiki, but it does not seem to be listed. Please let me know.
>  Thank you very much
>  Jonathan

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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