Fwd: RE: Pquest chemistry?
edmyers at stanford.edu
Thu Oct 20 07:34:48 PDT 2011
We have not been allowing Zn in any of our vacuum chambers due to it's
vapor pressure and long residence in a chamber.
On 10/19/2011 8:21 PM, Mary Tang wrote:
> Hey SpecMat-ers --
> ZnO in Pquest?
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> From: Mailoa Jonathan (CR/RTC2.1-NA)
> <fixed-term.Jonathan.Mailoa at us.bosch.com>
> To: Mary Tang <mtang at stanford.edu>
> CC: eenriquez at snf.stanford.edu <eenriquez at snf.stanford.edu>
> Date: Thu, 20 Oct 2011 02:44:10 +0200
> Subject: RE: Pquest chemistry?
> Thread-Topic: Pquest chemistry?
> Thread-Index: AcyOwOmLjPRbcGgZTo+aJ0jmHtUH6wAAC76A
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> Hi Mary,
> Thank you very much, this is great!
> I currently have ~1um ZnO on quartz wafer, with polystyrene microsphere as the etching mask. If it would be alright to etch this in pquest, can I be trained for it?
> -----Original Message-----
> From: Mary Tang [mailto:mtang at stanford.edu]
> Sent: Wednesday, October 19, 2011 5:41 PM
> To: Mailoa Jonathan (CR/RTC2.1-NA)
> Cc:eenriquez at snf.stanford.edu
> Subject: Re: Pquest chemistry?
> Hi Jonathan --
> Yes, indeed, the pquest is what you want (although we should have a
> couple more to offer you with the new etchers due to arrive in the next
> couple of months).
> The etch gases are on the wiki, but filed in a way that may not get
> found -- at the top of the dry etch folder:
> On 10/19/2011 5:36 PM, Mailoa Jonathan (CR/RTC2.1-NA) wrote:
> > Hi Mary and Elmer,
> > I have been trying to find a 'gold-contaminated' chlorine-based etcher in SNF. I am wondering if pquest uses chlorine-based chemistry for its etching process? What are the available gas?
> > I have been trying to find what the etching gas is in SNF wiki, but it does not seem to be listed. Please let me know.
> > Thank you very much
> > Jonathan
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> Paul G. Allen Room 136, Mail Code 4070
> Stanford, CA 94305
> mtang at stanford.edu
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