FePt Alloy Etching

Roopali Kukreja roopalik at stanford.edu
Mon Sep 26 08:54:44 PDT 2011

Hello All,

I have a process which requires metal etching in a particular pattern (produced by photomask). I was wondering would this be possible to do with dry etching on dryteks at SNF? or we need to do a wet etching, but in case of wet etching would the photoresist survive the wet-etch?

The metal I want to etch is 100nm Fe-Pt (50:50 approx) Alloy with 40 Angstroms of carbon as capping layer.

Thanks a lot for your help.


Roopali Kukreja
PhD Candidate
Material Science and Engg.
Stanford University

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