Process change request for sts dep

Mary Tang mtang at stanford.edu
Tue Sep 27 08:10:56 PDT 2011


Hi all --

Here's a request here from Dong Rip.  This is not the first time this 
has been discussed (Jim Kruger was talking about this a few months ago) 
though I don't think it was pursued at the time.  This is worth 
exploring.  Any thoughts?

Mary

-------- Original Message --------
Subject: 	how to request specmat?
Date: 	Tue, 27 Sep 2011 07:36:08 -0700 (PDT)
From: 	Dong Rip Kim <dongrip at stanford.edu>
To: 	mtang at stanford.edu
CC: 	dongrip at stanford.edu



Hi Mary,

I'd like to request specmat to approve the change of maximum plasma power (low-frequency mode) of sts PECVD. Can you advise me how to submit this request to specmat?

I'm now doing some experiments about ammonia plasma treatment (no deposition-related) in low-frequency RF mode. Currently, the maximum RF plasma power of low-frequency mode in sts PECVD is set as 100 W when flowing NH3 only, although the current low-frequency plasma power source has the 600 W capacity. Can we increase the current maximum power setting as 100 W to 300 W or 500 W?

I spoke with Jeannie and Jim Haydon on this, and they suggested me to request this to specmat.

Thank you,
Dong Rip

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