Question about photolithography with sub-10-micron features

John Ramunas johnramunas at
Wed Apr 4 20:51:52 PDT 2012

Dear SNF,

Do you (or a company you know of) provide a service which patterns
photoresist with feature sizes as small as 2 microns on silicone wafers?
The Stanford Microfluidics Foundry says their limit is 10 microns.

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