Question about photolithography with sub-10-micron features

[John Ramunas]

Dear SNF,

Do you (or a company you know of) provide a service which patterns
photoresist with feature sizes as small as 2 microns on silicone wafers?
The Stanford Microfluidics Foundry says their limit is 10 microns.

Thanks,
John
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20120404/6033a775/attachment.html>