Apiezon Wax-W

Mary Tang mtang at stanford.edu
Wed Apr 11 17:43:11 PDT 2012

Hi Nathan --

This is the infamous "black wax" often used in the lab.  It's fine to 
use at wbgeneral as Uli describes.  What we do have a problem with is 
the mess it creates on the hotplates in litho.  I'll defer to Mahnaz on 
how she would like (or not) to do this.  I can offer you a hotplate in 
the wafersaw room as an alternative.  I would suggest that cleanroom 
level cleanliness is not so important for applying black wax if the next 
step is gold-contaminated KOH labware.  Xylenes is the preferred method 
of removal at SNF (we don't allow TCA or borothene in the lab - these 
the traditional methods.)


On 4/11/2012 5:35 PM, Nathan Salowitz wrote:
> Hello,
>     I am seeking Specmat approval to use "Apiezon Wax-W" as a back 
> side protector in long KOH etches.
> Use (Application): there are 2 possibilities for application of the 
> material:
> 1) I can use a hotplate in the litho area, other lab members who I've 
> discussed this process with said "put aluminum foil everywhere"
> 2) alternatively I can use a hotplate in my lab, not as clean but an 
> option.
> Use (KOH etch):
> Uli indicated that it is ok to put this in the gold contaminated KOH 
> labware.
> Removal: I have found alternate facilities neighboring my lab to 
> remove the material using established methods (xylenes) and as this is 
> the last step in my process, my samples will not need to re-enter the 
> clean room.  I am also still looking into alternate methods for removal.
> Storage: I can store the wax in my lab, outside the SNF
> an MSDS and datasheet are attached.
>     Cheers,
>         Nate

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