mtang at stanford.edu
Wed Apr 11 17:43:11 PDT 2012
Hi Nathan --
This is the infamous "black wax" often used in the lab. It's fine to
use at wbgeneral as Uli describes. What we do have a problem with is
the mess it creates on the hotplates in litho. I'll defer to Mahnaz on
how she would like (or not) to do this. I can offer you a hotplate in
the wafersaw room as an alternative. I would suggest that cleanroom
level cleanliness is not so important for applying black wax if the next
step is gold-contaminated KOH labware. Xylenes is the preferred method
of removal at SNF (we don't allow TCA or borothene in the lab - these
the traditional methods.)
On 4/11/2012 5:35 PM, Nathan Salowitz wrote:
> I am seeking Specmat approval to use "Apiezon Wax-W" as a back
> side protector in long KOH etches.
> Use (Application): there are 2 possibilities for application of the
> 1) I can use a hotplate in the litho area, other lab members who I've
> discussed this process with said "put aluminum foil everywhere"
> 2) alternatively I can use a hotplate in my lab, not as clean but an
> Use (KOH etch):
> Uli indicated that it is ok to put this in the gold contaminated KOH
> Removal: I have found alternate facilities neighboring my lab to
> remove the material using established methods (xylenes) and as this is
> the last step in my process, my samples will not need to re-enter the
> clean room. I am also still looking into alternate methods for removal.
> Storage: I can store the wax in my lab, outside the SNF
> an MSDS and datasheet are attached.
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