From benck at stanford.edu Mon Aug 6 10:52:08 2012 From: benck at stanford.edu (Jesse Benck) Date: Mon, 06 Aug 2012 10:52:08 -0700 Subject: Tylan doping furnace training Message-ID: <50200448.50005@stanford.edu> Dear SNF Staff, I am a PhD student in Chemical Engineering and SNF user. I'm interested in receiving training on the Tylan5 / Tylan6 doping furnaces, but there isn't much information available about these tools on the Labmembers' Wiki. Can you please tell me who is in charge of the training for these furnaces so that I can inquire about the procedure for receiving training? Thank you, and best wishes, Jesse Benck From mtang at stanford.edu Mon Aug 6 10:59:55 2012 From: mtang at stanford.edu (Mary Tang) Date: Mon, 06 Aug 2012 10:59:55 -0700 Subject: Tylan doping furnace training In-Reply-To: <50200448.50005@stanford.edu> References: <50200448.50005@stanford.edu> Message-ID: <5020061B.9070004@stanford.edu> Hi Jesse -- Please contact Maurice Stevens, who is cc'ed here. Prerequisites for tylans 5-6 are: 1. qualification on tylans 1-4; and 2. qualification on wbdiff/wbnonmetal wet benches. Mary On 8/6/2012 10:52 AM, Jesse Benck wrote: > Dear SNF Staff, > > I am a PhD student in Chemical Engineering and SNF user. I'm > interested in receiving training on the Tylan5 / Tylan6 doping > furnaces, but there isn't much information available about these tools > on the Labmembers' Wiki. Can you please tell me who is in charge of > the training for these furnaces so that I can inquire about the > procedure for receiving training? > > Thank you, and best wishes, > > Jesse Benck > -- Mary X. Tang, Ph.D. Stanford Nanofabrication Facility Paul G. Allen Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at stanford.edu http://snf.stanford.edu From chieh at slac.stanford.edu Fri Aug 10 14:42:20 2012 From: chieh at slac.stanford.edu (Chang, Chieh) Date: Fri, 10 Aug 2012 14:42:20 -0700 Subject: Register for new chemical (Ethanol) and process (MacEtch) Message-ID: Dear SpecMat committee, I would like to register for bring in new chemical (Ethanol) and process (MacEtch) in SNF. Details are as follows, ? My name and full contact info Chieh Chang, SLAC National Accelerator Laboratory 2575 Sand Hill Road - MS 19 Menlo Park, CA 94025 510-384-6112 chieh at slac.stanford.edu ? My PI (Advisor) Anne Sakdinawat ? The name of the new Chemical (give all names commonly used): Ethanol (MSDS in attachment) ? If there are secondary new chemicals that must be used with this material (such as a developer for a new resist) list each of them here and supply MSDS's for each of them. No ? Complete manufacturer/vendor info, including contact info Sigma-Aldrich 3050 Spruce Street SAINT LOUIS MO 63103 USA +1 800-325-5832 ? A description of your plans for this new chemical/material/process I plan on introducing a new process at wet bench general called Metal-Assisted Chemical Etch (MacEtch). It's an anisotropic wet etching process using mixture of HF, H2O2, ethanol, and water to etch silicon catalyzed by gold/silver. Details of this technology is included in the attachment. Many thanks, Chieh -------------- next part -------------- A non-text attachment was scrubbed... Name: 2012_nanotech_Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires.pdf Type: application/pdf Size: 2476809 bytes Desc: 2012_nanotech_Porosity control in metal-assisted chemical etching of degenerately doped silicon nanowires.pdf URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: MSDS_Ethanol.pdf Type: application/pdf Size: 40800 bytes Desc: MSDS_Ethanol.pdf URL: From mahnaz at stanford.edu Fri Aug 10 15:49:33 2012 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 10 Aug 2012 15:49:33 -0700 Subject: Bringing Chemicals Into Lab In-Reply-To: References: Message-ID: <50258FFD.3060300@stanford.edu> Hi can Cai, Sorry for the delay, I am back from medical leave and some what buried in emails and requests. Polystyrene spheres are OK at headway. They can be dissolved by acetone, so should be OK. I like to exactly know your protocol so please do take time and sent it to specmat committee. Methanol alone might be too volatile. Also eventually you need to come and log your chemicals in the binder in my office ( 143) and get the labels. mahnaz On 8/10/2012 10:58 AM, Warren Cai wrote: > Hi, > > I sent you an email about bringing microspheres suspended in methanol > into the fab. Do I need to do anything else to be able to use it? > > Thank you, > Can Cai From ofaolain at stanford.edu Mon Aug 20 08:40:03 2012 From: ofaolain at stanford.edu (Liam O'Faolain) Date: Mon, 20 Aug 2012 08:40:03 -0700 Subject: Wright etchant Message-ID: <5031AFEB.2050208@stanford.edu> Dear committee, I would like to use Wright etchant to distinguish between amorphous and crystalline silicon, as in the attached paper. I am unaware of a similar chemical in the SNF (I have asked around). This is chemical is commercially available- Transene Company, Inc., 10 Electronics Avenue, Danvers MA 01923, www.transene.com (MSDS attached). This is preferable to making it up here. It would be stored in the bulk storage room. Processing would be carried in the general wetbench and carried out with gold contaminated beakers. It is in liquid form. Wright Etchant contains Hydrofluoric acid which is the primary hazard. The process flow is as follows: Prepare wafers with amorphous/crystalline silicon layers. Immerse in Wright etchant (time to be determined) Rinse in water Dispose of chemicals Examine wafers The disposal procedure should probably be the same as for Hydrofluoric Acid. However, Wright etchant also contains Cupric Nitrate. If this is a problem, then it will have to be locally collected. Yours, William -- Dr. William Whelan-Curtin (Liam O'Faolain) Ginzton Laboratory, Nano Building 348 Via Pueblo Mall, Stanford CA 94305, USA. http://www.nanophotonics.eu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: lateralovergrowthSPE_jr.pdf Type: application/pdf Size: 510341 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Wright Etchant GHS.doc Type: application/msword Size: 78336 bytes Desc: not available URL: From ofaolain at stanford.edu Thu Aug 23 18:53:30 2012 From: ofaolain at stanford.edu (Liam O'Faolain) Date: Thu, 23 Aug 2012 18:53:30 -0700 Subject: Wright etchant. In-Reply-To: References: Message-ID: <5036DE9A.3010700@stanford.edu> Dear Brett, My apologies for the delay, I was away from my email this afternoon. Here is the updated CCB request form and supporting documents. I have not yet ordered the chemical. I was waiting for approval before doing so. I will make sure that I follow your instructions. Thank you for your time, Yours, William (Liam) On 23/08/2012 15:12, Brett E. Huff wrote: > Liam, > Have you completed the CCB document with the details of your process flow and with the feedback from Mary, Mahnaz and Uli? > > I believe your chemical may have arrived today at our dock and no one knew what it was... > > Please complete header information and section 2 of the attached form. > > > > > If you already have done this and are ready for CCB, we meet tomorrow form 9-10 in CR101. The completed for should be sent to "change-control-snf" distribution this afternoon. > > > Brett E. Huff > SNF Clean Room Manager > Stanford University > ?510-612-8670 > bhuff at stanford.edu > -- Dr. William Whelan-Curtin (Liam O'Faolain) Ginzton Laboratory, Nano Building 348 Via Pueblo Mall, Stanford CA 94305, USA. http://www.nanophotonics.eu -------------- next part -------------- An HTML attachment was scrubbed... URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: CCB Request Form v2_WrightEtchant.docx Type: application/vnd.openxmlformats-officedocument.wordprocessingml.document Size: 124841 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: Wright Etchant GHS.doc Type: application/msword Size: 78336 bytes Desc: not available URL: -------------- next part -------------- A non-text attachment was scrubbed... Name: lateralovergrowthSPE_jr.pdf Type: application/pdf Size: 510341 bytes Desc: not available URL: From bhuff at stanford.edu Thu Aug 23 19:08:16 2012 From: bhuff at stanford.edu (Brett E. Huff) Date: Thu, 23 Aug 2012 19:08:16 -0700 (PDT) Subject: Wright etchant. Message-ID: <555DEA2E-0B61-41B2-A223-C2053B8FE63D@stanford.edu> Liam, see you at 9:15 in CR101. Sent from my iPhone On Aug 23, 2012, at 6:53 PM, Liam O'Faolain wrote: > Dear Brett, > > My apologies for the delay, I was away from my email this afternoon. > > Here is the updated CCB request form and supporting documents. > > I have not yet ordered the chemical. I was waiting for approval before > doing so. I will make sure that I follow your instructions. > > Thank you for your time, > Yours, > William (Liam) > > > On 23/08/2012 15:12, Brett E. Huff wrote: >> Liam, >> Have you completed the CCB document with the details of your process flow and with the feedback from Mary, Mahnaz and Uli? >> >> I believe your chemical may have arrived today at our dock and no one knew what it was... >> >> Please complete header information and section 2 of the attached form. >> >> >> >> >> If you already have done this and are ready for CCB, we meet tomorrow form 9-10 in CR101. The completed for should be sent to "change-control-snf" distribution this afternoon. >> >> >> Brett E. Huff >> SNF Clean Room Manager >> Stanford University >> ?510-612-8670 >> bhuff at stanford.edu >> > > -- > Dr. William Whelan-Curtin (Liam O'Faolain) > Ginzton Laboratory, Nano Building > 348 Via Pueblo Mall, Stanford CA 94305, USA. > http://www.nanophotonics.eu > > > >