Register for new chemical (Ethanol) and process (MacEtch)

[Chang, Chieh]

Dear SpecMat committee,

I would like to register for bring in new chemical (Ethanol) and process (MacEtch) in SNF.
Details are as follows,

• My name and full contact info
Chieh Chang,
SLAC National Accelerator Laboratory
2575 Sand Hill Road - MS 19
Menlo Park, CA 94025
510-384-6112
chieh at slac.stanford.edu<mailto:chieh at slac.stanford.edu>

• My PI (Advisor)
Anne Sakdinawat

• The name of the new Chemical (give all names commonly used):
Ethanol (MSDS in attachment)

• If there are secondary new chemicals that must be used with this material (such as a developer for a new resist) list each of them here and supply MSDS's for each of them.
No

• Complete manufacturer/vendor info, including contact info
Sigma-Aldrich
3050 Spruce Street SAINT LOUIS MO 63103 USA
+1 800-325-5832

• A description of your plans for this new chemical/material/process
I plan on introducing a new process at wet bench general called Metal-Assisted Chemical Etch (MacEtch).
It's an anisotropic wet etching process using mixture of HF, H2O2, ethanol, and water to etch silicon catalyzed by gold/silver.
Details of this technology is included in the attachment.

Many thanks,
Chieh




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