process in tylan nitride

Mary Tang mtang at
Wed Mar 7 06:02:48 PST 2012

HI Rostam --

Following discussion with Don, we have been discussing this request.  I 
believe the consensus so far is that if the TXRF looks good, it's OK.  
There is still a question of what kind of pre-furnace cleans will be used.

The SpecMat team normally meets Thursdays at 2:30 to review requests.  
If you would like to get on the agenda for tomorrow, please contact John 
B.  His email is jbumgarner at

The request should include:  what, if any previous processing, the 
wafers have undergone.  Substrate size and number (for example, do you 
plan to have your own quartzware or will you place samples on top of 4" 
wafers?.) What kind of wet clean is required?  Basically, any processing 
and logistics that are non-standard.  Not to worry, GaN has been 
processed in the lab -- but we just don't have documentation on how it's 
done.  Your contribution will help a lot.



On 3/6/2012 7:44 PM, Rostam Dinyari wrote:
> Dear committee,
> I want to deposit LPCVD nitride films on GaN wafers using tylan nitride tube. The wafers will be sent this week to Evans Analytical group for TXRF in order to make sure the wafers are free of metal contamination and the results will be submitted to SNF.
> I'd appreciate it if you could review this request and grant me the permission to use the tube.
> Best,
> Rostam

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