From cbellew at snf.stanford.edu Thu Dec 12 02:22:00 2002 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Dec 12, 2002 2:22:00 PM Subject: Problem stresstest 2002-12-12 14:21:59: Stage movement is intermittent Message-ID: When I try to do a scan or a map, the stage will sometimes move to the center position and then freeze. It will not actually scan the wafer. This happens on both the test wafers and on my actual wafers. From uli at snf.stanford.edu Fri Dec 13 01:31:58 2002 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Dec 13, 2002 1:31:58 PM Subject: Problem stresstest 2002-12-12 14:21:59: Stage movement is intermittent Message-ID: It is working fine now From cbellew at snf.stanford.edu Wed Dec 18 11:53:18 2002 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: Dec 18, 2002 11:53:18 PM Subject: Problem stresstest 2002-12-18 23:53:17: Stage sometimes doesn't move Message-ID: The screw which turns to move the stage in and out doesn't always engage so that even though the motor is turning, the stage doesn't necessarily move. From uli at snf.stanford.edu Thu Dec 19 09:52:43 2002 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Dec 19, 2002 9:52:43 AM Subject: Shutdown stresstest 2002-12-19 09:52:43: stage not connected Message-ID: