Problem stresstest 2002-12-12 14:21:59: Stage movement is intermittent

cbellew at snf.stanford.edu cbellew at snf.stanford.edu
Thu Dec 12 02:22:00 PST 2002


When I try to do a scan or a map, the stage will sometimes
move to the center position and then freeze.  It will not actually
scan the wafer.  This happens on both the test wafers and on
my actual wafers.




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