Shutdown stresstest: all sorts of problems

pcastle at snf.stanford.edu pcastle at snf.stanford.edu
Sun Dec 23 09:21:35 PST 2012


i had problems entering data on scan setup and changing data.  it would not let me change film thicknesses and wafer size.  it then would not park the motor.  The motors buzz and whirl but it does not move.  It is now stuck in the out position.




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