From seymour at snf.stanford.edu  Fri Aug  3 09:12:21 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Aug 3, 2001 9:12:21 AM
Subject: Shutdown sts 2001-08-03 09:12:18: silane bal N2 bottle change
Message-ID: <mailman.40.1357938603.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Wed Aug  8 02:14:19 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Aug 8, 2001 2:14:19 PM
Subject: Shutdown sts 2001-08-03 09:12:18: silane bal N2 bottle change
Message-ID: <mailman.41.1357938603.25857.sts-pcs@snf.stanford.edu>

cylinder changed and leak check passed, tool up to run 



From dton at snf.stanford.edu  Wed Aug 15 08:56:22 2001
From: dton at snf.stanford.edu (dton at snf.stanford.edu)
Date: Aug 15, 2001 8:56:22 PM
Subject: Problem sts 2001-08-15 20:56:20: System Error : Purge gas flow fault
Message-ID: <mailman.42.1357938603.25857.sts-pcs@snf.stanford.edu>

Okie, that is the error I got when I finished using the
machine.  It does this when I try to purge the line.



From seymour at snf.stanford.edu  Mon Aug 20 11:42:45 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Aug 20, 2001 11:42:45 AM
Subject: Problem sts 2001-08-15 20:56:20: System Error : Purge gas flow fault
Message-ID: <mailman.43.1357938603.25857.sts-pcs@snf.stanford.edu>

Jim fixed this last week.



From ukris at snf.stanford.edu  Tue Aug 21 12:19:21 2001
From: ukris at snf.stanford.edu (ukris at snf.stanford.edu)
Date: Aug 21, 2001 12:19:21 PM
Subject: Problem sts 2001-08-21 12:19:19: Communications fault
Message-ID: <mailman.44.1357938603.25857.sts-pcs@snf.stanford.edu>

Sytem error - "module serial communication fault" - only available option - Shutdown!



From dton at snf.stanford.edu  Tue Aug 21 12:52:38 2001
From: dton at snf.stanford.edu (dton at snf.stanford.edu)
Date: Aug 21, 2001 12:52:38 PM
Subject: Problem sts 2001-08-21 12:52:36: Clear Comm Error
Message-ID: <mailman.45.1357938603.25857.sts-pcs@snf.stanford.edu>

Here is the instruction to clear the error - please put into the instruction sheet.
1)  Hit F1 to shutdown 
2) Make sure all the interlock switches are out.  Pull on the switches
3) Make sure PLANT is ON (Press PLANT ON once or twice).
4) Type "process" and press <ENTER> at the "C:>" prompt.



From jhaydon at snf.stanford.edu  Sat Aug 25 06:29:04 2001
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Aug 25, 2001 6:29:04 AM
Subject: Shutdown sts 2001-08-25 06:29:04: shut down for work on air handeling system
Message-ID: <mailman.46.1357938603.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Sat Aug 25 04:03:26 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Aug 25, 2001 4:03:26 PM
Subject: Shutdown sts 2001-08-25 06:29:04: shut down for work on air handeling system
Message-ID: <mailman.47.1357938603.25857.sts-pcs@snf.stanford.edu>

facilities ok



From dton at snf.stanford.edu  Sun Aug 26 05:45:24 2001
From: dton at snf.stanford.edu (dton at snf.stanford.edu)
Date: Aug 26, 2001 5:45:24 PM
Subject: Problem sts 2001-08-26 17:45:23: Pressure tolerance error
Message-ID: <mailman.48.1357938603.25857.sts-pcs@snf.stanford.edu>

Ran a nitride deposition process - dt_ni_1k - mid way
through the run got the "Pressure Tolerance Error".  Set 
pressure is 650 - measured 715.



From seymour at snf.stanford.edu  Fri Aug 31 07:57:41 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Aug 31, 2001 7:57:41 AM
Subject: Problem sts 2001-08-21 12:19:19: Communications fault
Message-ID: <mailman.49.1357938603.25857.sts-pcs@snf.stanford.edu>

its working



From seymour at snf.stanford.edu  Fri Aug 31 07:58:25 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Aug 31, 2001 7:58:25 AM
Subject: Problem sts 2001-08-21 12:52:36: Clear Comm Error
Message-ID: <mailman.50.1357938603.25857.sts-pcs@snf.stanford.edu>

its working



From seymour at snf.stanford.edu  Fri Aug 31 07:58:42 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Aug 31, 2001 7:58:42 AM
Subject: Problem sts 2001-08-26 17:45:23: Pressure tolerance error
Message-ID: <mailman.51.1357938603.25857.sts-pcs@snf.stanford.edu>

its working



From dton at snf.stanford.edu  Fri Aug 31 02:16:31 2001
From: dton at snf.stanford.edu (dton at snf.stanford.edu)
Date: Aug 31, 2001 2:16:31 PM
Subject: Problem sts 2001-08-31 14:16:31: Error : Purge Gas Flow Fault
Message-ID: <mailman.52.1357938603.25857.sts-pcs@snf.stanford.edu>

Got this error during the pump/purge cycle.  Once
when it's finished with the process & once when
it started another process.
Dinh