Problem sts 2001-08-26 17:45:23: Pressure tolerance error

dton at snf.stanford.edu dton at snf.stanford.edu
Sun Aug 26 05:45:24 PDT 2001


Ran a nitride deposition process - dt_ni_1k - mid way
through the run got the "Pressure Tolerance Error".  Set 
pressure is 650 - measured 715.




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