Problem sts 2001-10-17 17:48:07: Broken piece of wafer

dton at snf.stanford.edu dton at snf.stanford.edu
Wed Oct 17 05:48:08 PDT 2001


A piece about 3-4 cm^2 broke off from the main wafer & 
should be somewhere in the chamber.  The rest of the
wafer is still intact on the carrier wafer.
Dinh




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