Problem sts 2001-10-19 18:59:08: Leak?

dton at snf.stanford.edu dton at snf.stanford.edu
Fri Oct 19 06:59:09 PDT 2001


There might be a leak in the system.  After the "oxpredep"
 during the cleaning cycle, there were some white powder
near the top of the chamber wall.
Dinh




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