From jdas at snf.stanford.edu  Wed Apr  3 12:38:55 2002
From: jdas at snf.stanford.edu (jdas at snf.stanford.edu)
Date: Apr 3, 2002 12:38:55 PM
Subject: Problem sts 2002-04-03 12:38:55: Nitrous oxide flow problem.
Message-ID: <mailman.94.1357938603.25857.sts-pcs@snf.stanford.edu>




From storment at snf.stanford.edu  Fri Apr  5 06:01:39 2002
From: storment at snf.stanford.edu (storment at snf.stanford.edu)
Date: Apr 5, 2002 6:01:39 PM
Subject: Problem sts 2002-04-05 18:01:39: Bad Plasma
Message-ID: <mailman.95.1357938603.25857.sts-pcs@snf.stanford.edu>

The system is arcing during etchbak3 and o2descum. I also see reductions in my usual dep rates for oxide. Use at your own risk



From jhaydon at snf.stanford.edu  Tue Apr 16 01:55:04 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 16, 2002 1:55:04 PM
Subject: Shutdown sts 2002-04-16 13:55:03: shut down for service should be on line early next week
Message-ID: <mailman.96.1357938603.25857.sts-pcs@snf.stanford.edu>