Problem sts 2002-04-05 18:01:39: Bad Plasma
storment at snf.stanford.edu
storment at snf.stanford.edu
Fri Apr 5 06:01:39 PST 2002
The system is arcing during etchbak3 and o2descum. I also see reductions in my usual dep rates for oxide. Use at your own risk
More information about the sts-pcs
mailing list