From jhaydon at snf.stanford.edu Thu Aug 1 02:44:51 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Aug 1, 2002 2:44:51 PM Subject: Problem sts 2002-07-31 16:21:12: lid while open loses it's compressed air Message-ID: lid operates ok now From jhaydon at snf.stanford.edu Tue Aug 13 03:35:30 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Aug 13, 2002 3:35:30 PM Subject: Problem sts 2002-08-06 20:42:19: SiH4 purge problem Message-ID: replaced nitogen shutoff valve working now ok to use From mwiemer at snf.stanford.edu Thu Aug 15 11:07:00 2002 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Aug 15, 2002 11:07:00 AM Subject: Problem sts 2002-08-15 11:06:59: pumpdown time exceeded Message-ID: The chamber will not pump down to 15mTorr. It just stays at around 58-60mTorr. You either get a "pumpdown time exceeded" error and have to abort the process, or it just sits there indefinately at 60mTorr. I cannot run processes. From jhaydon at snf.stanford.edu Thu Aug 15 02:19:07 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Aug 15, 2002 2:19:07 PM Subject: Problem sts 2002-08-15 11:06:59: pumpdown time exceeded Message-ID: argon purge accidently left open From kwang at snf.stanford.edu Thu Aug 15 06:35:53 2002 From: kwang at snf.stanford.edu (kwang at snf.stanford.edu) Date: Aug 15, 2002 6:35:53 PM Subject: Problem sts 2002-08-15 18:35:52: purge gas flow fault Message-ID: have to shut down to resume (run #1242) can smell something when loading wafer afterwards (run #1243) From jhaydon at snf.stanford.edu Mon Aug 26 07:55:58 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Aug 26, 2002 7:55:58 AM Subject: Problem sts 2002-08-15 18:35:52: purge gas flow fault Message-ID: purge gas flow fault should be ok now