Problem sts 2002-07-31 16:21:12: lid while open loses it's compressed air
jhaydon at snf.stanford.edu
jhaydon at snf.stanford.edu
Thu Aug 1 02:44:51 PDT 2002
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lid operates ok now
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Problem sts 2002-08-06 20:42:19: SiH4 purge problem
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