Problem sts 2002-08-15 11:06:59: pumpdown time exceeded

mwiemer at snf.stanford.edu mwiemer at snf.stanford.edu
Thu Aug 15 11:07:00 PDT 2002


The chamber will not pump down to 15mTorr.  It just stays at around 58-60mTorr.  You either get a "pumpdown time exceeded" error and have to abort the process, or it just sits there indefinately at 60mTorr.  I cannot run processes.




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