From davehong at snf.stanford.edu  Wed Feb 13 08:05:28 2002
From: davehong at snf.stanford.edu (davehong at snf.stanford.edu)
Date: Feb 13, 2002 8:05:28 AM
Subject: Problem sts 2002-02-13 08:05:26: NO2 flow not stable
Message-ID: <mailman.79.1357938603.25857.sts-pcs@snf.stanford.edu>

I was trying to run at 900 sccm,  the flow count not be stablized.



From jperez at snf.stanford.edu  Fri Feb 15 04:20:48 2002
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Feb 15, 2002 4:20:48 PM
Subject: Comment sts 2002-02-15 16:20:47: NO2 valve was closed
Message-ID: <mailman.80.1357938603.25857.sts-pcs@snf.stanford.edu>




From kyang at snf.stanford.edu  Sun Feb 17 12:07:48 2002
From: kyang at snf.stanford.edu (kyang at snf.stanford.edu)
Date: Feb 17, 2002 12:07:48 AM
Subject: Problem sts 2002-02-17 00:07:48: silane flow problem
Message-ID: <mailman.81.1357938603.25857.sts-pcs@snf.stanford.edu>

After the deposition start, silane flow rate reaches 1320, than
quickly drop to zero.



From booth at snf.stanford.edu  Tue Feb 19 12:13:01 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 19, 2002 12:13:01 PM
Subject: Shutdown sts 2002-02-19 12:13:00: STSetch maintenance at 12:45pm today
Message-ID: <mailman.82.1357938603.25857.sts-pcs@snf.stanford.edu>




From sguan at snf.stanford.edu  Wed Feb 20 09:10:29 2002
From: sguan at snf.stanford.edu (sguan at snf.stanford.edu)
Date: Feb 20, 2002 9:10:29 AM
Subject: Comment sts 2002-02-20 09:10:27: Noted on PECVD, wrong machine, should be etcher
Message-ID: <mailman.83.1357938603.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Wed Feb 20 09:14:31 2002
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Feb 20, 2002 9:14:31 AM
Subject: Shutdown sts 2002-02-19 12:13:00: STSetch maintenance at 12:45pm today
Message-ID: <mailman.84.1357938603.25857.sts-pcs@snf.stanford.edu>

Len put down wrong STS, this is STS PECVD