February 2002 Archives by author

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Starting: Wed Feb 13 08:05:28 PST 2002
Ending: Wed Feb 20 09:14:31 PST 2002
Messages: 6

• Shutdown sts 2002-02-19 12:13:00: STSetch maintenance at 12:45pm today   booth at snf.stanford.edu
• Problem sts 2002-02-13 08:05:26: NO2 flow not stable   davehong at snf.stanford.edu
• Comment sts 2002-02-15 16:20:47: NO2 valve was closed   jperez at snf.stanford.edu
• Shutdown sts 2002-02-19 12:13:00: STSetch maintenance at 12:45pm today   jperez at snf.stanford.edu
• Problem sts 2002-02-17 00:07:48: silane flow problem   kyang at snf.stanford.edu
• Comment sts 2002-02-20 09:10:27: Noted on PECVD, wrong machine, should be etcher   sguan at snf.stanford.edu

Last message date: Wed Feb 20 09:14:31 PST 2002
Archived on: Fri Jan 11 13:10:17 PST 2013

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