From seymour at snf.stanford.edu  Wed Jul 10 07:19:26 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 10, 2002 7:19:26 AM
Subject: Shutdown sts 2002-07-10 07:19:24: silane/N2 bottle changed, on leak check
Message-ID: <mailman.100.1357938603.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Thu Jul 11 09:00:20 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 11, 2002 9:00:20 AM
Subject: Shutdown sts 2002-07-10 07:19:24: silane/N2 bottle changed, on leak check
Message-ID: <mailman.101.1357938603.25857.sts-pcs@snf.stanford.edu>

bottle changed and leak check passed



From seymour at snf.stanford.edu  Thu Jul 11 09:00:49 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 11, 2002 9:00:49 AM
Subject: Shutdown sts 2002-07-11 09:00:49: Needs testing after silane/N2 bottle change
Message-ID: <mailman.102.1357938603.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Thu Jul 11 02:31:42 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 11, 2002 2:31:42 PM
Subject: Shutdown sts 2002-07-11 09:00:49: Needs testing after silane/N2 bottle change
Message-ID: <mailman.103.1357938603.25857.sts-pcs@snf.stanford.edu>

Chris will run a test



From jhaydon at snf.stanford.edu  Mon Jul 15 08:58:51 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 15, 2002 8:58:51 AM
Subject: Problem sts 2002-04-03 12:38:55: Nitrous oxide flow problem.
Message-ID: <mailman.104.1357938603.25857.sts-pcs@snf.stanford.edu>

problem not seen lately



From jhaydon at snf.stanford.edu  Thu Jul 18 12:14:43 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 18, 2002 12:14:43 PM
Subject: Problem sts 2002-07-18 12:14:42: nitride will not be available problem with MFC should be fixed by Tuesday
Message-ID: <mailman.105.1357938603.25857.sts-pcs@snf.stanford.edu>




From yyao at snf.stanford.edu  Thu Jul 18 05:08:32 2002
From: yyao at snf.stanford.edu (yyao at snf.stanford.edu)
Date: Jul 18, 2002 5:08:32 PM
Subject: Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm. 
Message-ID: <mailman.106.1357938603.25857.sts-pcs@snf.stanford.edu>

Please check silane/N2 gas bottle...jperez



From jhaydon at snf.stanford.edu  Wed Jul 24 09:58:20 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 24, 2002 9:58:20 AM
Subject: Comment sts 2002-07-24 09:58:20: sts will be shut down for some PM on the pumps
Message-ID: <mailman.107.1357938603.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Jul 24 10:00:15 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 24, 2002 10:00:15 AM
Subject: Comment sts 2002-07-24 10:00:15: sts will be shut down on 07/30 from 10:00 to noon for some PM on the pumps
Message-ID: <mailman.108.1357938603.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Jul 24 04:11:17 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 24, 2002 4:11:17 PM
Subject: Shutdown sts 2002-07-24 16:11:16: leaking gate valve 
Message-ID: <mailman.109.1357938603.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Thu Jul 25 04:11:49 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 25, 2002 4:11:49 PM
Subject: Shutdown sts 2002-07-24 16:11:16: leaking gate valve 
Message-ID: <mailman.110.1357938603.25857.sts-pcs@snf.stanford.edu>

repaired valve



From jhaydon at snf.stanford.edu  Thu Jul 25 04:12:21 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 25, 2002 4:12:21 PM
Subject: Problem sts 2002-07-18 12:14:42: nitride will not be available problem with MFC should be fixed by Tuesday
Message-ID: <mailman.111.1357938603.25857.sts-pcs@snf.stanford.edu>

MFC replaced should be ok to use



From jhaydon at snf.stanford.edu  Thu Jul 25 04:13:23 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 25, 2002 4:13:23 PM
Subject: Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm. 
Message-ID: <mailman.112.1357938603.25857.sts-pcs@snf.stanford.edu>

problem may be intermitant was not  able to duplicate



From storment at snf.stanford.edu  Fri Jul 26 04:22:09 2002
From: storment at snf.stanford.edu (storment at snf.stanford.edu)
Date: Jul 26, 2002 4:22:09 PM
Subject: Shutdown sts 2002-07-26 16:22:08: MFC/ Iso Valve Bad
Message-ID: <mailman.113.1357938603.25857.sts-pcs@snf.stanford.edu>

system unable to purge NH3 line. Purge gas flow error?



From jhaydon at snf.stanford.edu  Mon Jul 29 04:24:29 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 29, 2002 4:24:29 PM
Subject: Shutdown sts 2002-07-29 16:24:27: bad pressure transducer isolation valve
Message-ID: <mailman.114.1357938603.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Jul 31 10:07:25 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 31, 2002 10:07:25 AM
Subject: Shutdown sts 2002-07-29 16:24:27: bad pressure transducer isolation valve
Message-ID: <mailman.115.1357938603.25857.sts-pcs@snf.stanford.edu>

valve replaced



From jhaydon at snf.stanford.edu  Wed Jul 31 10:08:26 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jul 31, 2002 10:08:26 AM
Subject: Shutdown sts 2002-07-26 16:22:08: MFC/ Iso Valve Bad
Message-ID: <mailman.116.1357938603.25857.sts-pcs@snf.stanford.edu>

MFC replaced isolation valve repaired ok to test