Problem sts 2002-04-03 12:38:55: Nitrous oxide flow problem.
jhaydon at snf.stanford.edu
jhaydon at snf.stanford.edu
Mon Jul 15 08:58:51 PDT 2002
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Shutdown sts 2002-07-11 09:00:49: Needs testing after silane/N2 bottle change
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Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm.
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Shutdown sts 2002-07-11 09:00:49: Needs testing after silane/N2 bottle change
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Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm.
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