Problem sts 2002-07-18 12:14:42: nitride will not be available problem with MFC should be fixed by Tuesday
jhaydon at snf.stanford.edu
jhaydon at snf.stanford.edu
Thu Jul 18 12:14:43 PDT 2002
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Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm.
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Problem sts 2002-07-18 12:14:42: nitride will not be available problem with MFC should be fixed by Tuesday
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Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm.
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Problem sts 2002-07-18 12:14:42: nitride will not be available problem with MFC should be fixed by Tuesday
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