Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm.

jhaydon at snf.stanford.edu jhaydon at snf.stanford.edu
Thu Jul 25 04:13:23 PDT 2002

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problem may be intermitant was not  able to duplicate

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Next message: Problem sts 2002-07-18 12:14:42: nitride will not be available problem with MFC should be fixed by Tuesday
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