Problem sts 2002-07-18 17:08:32: 2% silane flow dropped below 300 sccm from 400 sccm.

jhaydon at snf.stanford.edu jhaydon at snf.stanford.edu
Thu Jul 25 04:13:23 PDT 2002


problem may be intermitant was not  able to duplicate




More information about the sts-pcs mailing list