From wistey at snf.stanford.edu  Mon Mar 11 06:20:21 2002
From: wistey at snf.stanford.edu (wistey at snf.stanford.edu)
Date: Mar 11, 2002 6:20:21 PM
Subject: Problem sts 2002-03-11 18:20:19: STS ammonia flow
Message-ID: <mailman.85.1357938603.25857.sts-pcs@snf.stanford.edu>

Our run on the STS machine aborted partway through a layer, saying "Gas Flow Error (Ammonia)".  Hitting Resume gave the same message. Ammonia flow is varying from 0-15sccm on the screen.



From cbaxter at snf.stanford.edu  Mon Mar 11 10:15:25 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 11, 2002 10:15:25 PM
Subject: Comment sts 2002-03-11 22:15:24: NH3 mfc is bad. can't control setpoint
Message-ID: <mailman.86.1357938603.25857.sts-pcs@snf.stanford.edu>




From raldaz at snf.stanford.edu  Tue Mar 12 01:08:40 2002
From: raldaz at snf.stanford.edu (raldaz at snf.stanford.edu)
Date: Mar 12, 2002 1:08:40 PM
Subject: Problem sts 2002-03-12 13:08:40: Ammonia flow error
Message-ID: <mailman.87.1357938603.25857.sts-pcs@snf.stanford.edu>

The ammonia gas flow dropped and became unstable after depositing several pairs of SiN and SiO.  The gas flow should have been 35sccm but was oscillating around 10sccm.  Reseting the controller didn't solve the problem.  The gas tank flow was OK.  The problem was solved by aborting the step and running the process again from scratch.  This happened twice in a 7 hour process.  It was solved both times by restarting the process.



From seymour at snf.stanford.edu  Thu Mar 14 06:56:26 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 14, 2002 6:56:26 AM
Subject: Shutdown sts 2002-03-14 06:56:25: checking ammonia system
Message-ID: <mailman.88.1357938603.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Mar 15 10:40:42 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 15, 2002 10:40:42 AM
Subject: Shutdown sts 2002-03-14 06:56:25: checking ammonia system
Message-ID: <mailman.89.1357938603.25857.sts-pcs@snf.stanford.edu>

NH3 pressure and regulator look ok



From seymour at snf.stanford.edu  Fri Mar 15 10:41:08 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 15, 2002 10:41:08 AM
Subject: Problem sts 2002-03-12 13:08:40: Ammonia flow error
Message-ID: <mailman.90.1357938603.25857.sts-pcs@snf.stanford.edu>

Nh3 looks ok



From seymour at snf.stanford.edu  Fri Mar 15 10:41:26 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 15, 2002 10:41:26 AM
Subject: Problem sts 2002-03-11 18:20:19: STS ammonia flow
Message-ID: <mailman.91.1357938603.25857.sts-pcs@snf.stanford.edu>

NH3 looks ok



From seymour at snf.stanford.edu  Thu Mar 21 07:33:05 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 21, 2002 7:33:05 AM
Subject: Shutdown sts 2002-03-21 07:33:05: Changing Silane/bal N2 cylinger
Message-ID: <mailman.92.1357938603.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Mar 22 08:39:29 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 22, 2002 8:39:29 AM
Subject: Shutdown sts 2002-03-21 07:33:05: Changing Silane/bal N2 cylinger
Message-ID: <mailman.93.1357938603.25857.sts-pcs@snf.stanford.edu>

leak check passed.