Problem sts 2002-04-05 18:01:39: Bad Plasma
jhaydon at snf.stanford.edu
jhaydon at snf.stanford.edu
Fri May 24 05:43:53 PDT 2002
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Shutdown sts 2002-04-16 13:55:03: shut down for service should be on line early next week
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Comment sts 2002-05-29 09:20:45: Use only one of three std_???? recipes for now
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plasma seems to be ok had bad shower head
Previous message:
Shutdown sts 2002-04-16 13:55:03: shut down for service should be on line early next week
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Comment sts 2002-05-29 09:20:45: Use only one of three std_???? recipes for now
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