From storment at snf.stanford.edu Mon Nov 4 07:59:19 2002 From: storment at snf.stanford.edu (storment at snf.stanford.edu) Date: Nov 4, 2002 7:59:19 PM Subject: Shutdown sts 2002-11-04 19:59:18: RF grounding problems Message-ID: Jim, the pressure and MFC's read accurately until you turn on the RF. especially the oxide process and the o2descum. The oxide process in fact turns off with a sih4 mfc error. I also found a dissconnecteed grounding wire. I couldn't find a connection for it that made the problem go away From jhaydon at snf.stanford.edu Tue Nov 5 11:25:58 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 5, 2002 11:25:58 AM Subject: Shutdown sts 2002-11-04 19:59:18: RF grounding problems Message-ID: found loose ground connection tightened it and ran a nitride and oxide dep and did not see any problems From storment at snf.stanford.edu Tue Nov 5 06:18:30 2002 From: storment at snf.stanford.edu (storment at snf.stanford.edu) Date: Nov 5, 2002 6:18:30 PM Subject: Shutdown sts 2002-11-05 18:18:30: RF Shorting problem Message-ID: Jim , there is a problem with the hi freq processes. The low frequency processes are unaffected, and that is why you got some successess yesterday. The problem is either in the hi freq match box or some where in the rf circuit, like a capacitive short as opposed to a resistive short that would also affect the low frequency. This means you need to take apart the tune box and start to hunt for obvious problems. It's like leak checking! Tons of fun might take several days to find the problem. From jhaydon at snf.stanford.edu Wed Nov 6 04:05:49 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 6, 2002 4:05:49 PM Subject: Shutdown sts 2002-11-05 18:18:30: RF Shorting problem Message-ID: RF shorting fixed ok to use after warm up and o2descum From jhaydon at snf.stanford.edu Thu Nov 7 09:53:29 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 7, 2002 9:53:29 AM Subject: Problem sts 2002-11-07 09:53:27: being calibrated do not use until completed Message-ID: From jhaydon at snf.stanford.edu Thu Nov 7 09:53:59 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 7, 2002 9:53:59 AM Subject: Problem sts 2002-11-07 09:53:27: being calibrated do not use until completed Message-ID: From jhaydon at snf.stanford.edu Thu Nov 7 09:54:42 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 7, 2002 9:54:42 AM Subject: Shutdown sts 2002-11-07 09:54:42: being calibrated do not use until completed Message-ID: From latta at snf.stanford.edu Thu Nov 7 02:34:53 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 7, 2002 2:34:53 PM Subject: Shutdown sts 2002-11-07 09:54:42: being calibrated do not use until completed Message-ID: ok From jhaydon at snf.stanford.edu Thu Nov 14 11:45:47 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 14, 2002 11:45:47 AM Subject: Shutdown sts 2002-11-14 11:45:46: Nitrogen Silane bottle change Message-ID: From jhaydon at snf.stanford.edu Wed Nov 20 04:22:27 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Nov 20, 2002 4:22:27 PM Subject: Shutdown sts 2002-11-14 11:45:46: Nitrogen Silane bottle change Message-ID: sts ok to use after qualifiing