Shutdown sts 2002-11-04 19:59:18: RF grounding problems

storment at snf.stanford.edu storment at snf.stanford.edu
Mon Nov 4 07:59:19 PST 2002


Jim, the pressure and MFC's read accurately until you turn on the  RF. especially the oxide process and the o2descum. The oxide process in fact turns off with a sih4 mfc error. I also found 
a dissconnecteed grounding wire. I couldn't find a connection for it that made the problem go away




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