From quickwin at snf.stanford.edu  Thu Oct  3 04:01:34 2002
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Oct 3, 2002 4:01:34 PM
Subject: Problem sts 2002-10-03 16:01:31: chamber lid could not close
Message-ID: <mailman.132.1357938603.25857.sts-pcs@snf.stanford.edu>

Today after I unloaded my wafer, I followed procedure to close the lid but the lid does not come down. The machine does not respond to any Function keys. 



From cbaxter at snf.stanford.edu  Thu Oct  3 09:40:07 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Oct 3, 2002 9:40:07 PM
Subject: Problem sts 2002-10-03 16:01:31: chamber lid could not close
Message-ID: <mailman.133.1357938603.25857.sts-pcs@snf.stanford.edu>

found tool power down. power it back up and close lid.



From ericp at snf.stanford.edu  Sat Oct  5 04:53:29 2002
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Oct 5, 2002 4:53:29 PM
Subject: Problem sts 2002-10-05 16:53:28: Clean in progress
Message-ID: <mailman.134.1357938603.25857.sts-pcs@snf.stanford.edu>




From ericp at snf.stanford.edu  Sun Oct  6 02:07:21 2002
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Oct 6, 2002 2:07:21 PM
Subject: Problem sts 2002-10-06 14:07:20: Clean Complete!
Message-ID: <mailman.135.1357938603.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Mon Oct  7 08:27:22 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Oct 7, 2002 8:27:22 AM
Subject: Problem sts 2002-10-06 14:07:20: Clean Complete!
Message-ID: <mailman.136.1357938603.25857.sts-pcs@snf.stanford.edu>

clean complete



From jhaydon at snf.stanford.edu  Mon Oct  7 08:27:43 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Oct 7, 2002 8:27:43 AM
Subject: Problem sts 2002-10-05 16:53:28: Clean in progress
Message-ID: <mailman.137.1357938604.25857.sts-pcs@snf.stanford.edu>

clean comlpete



From jhaydon at snf.stanford.edu  Wed Oct 16 08:13:35 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Oct 16, 2002 8:13:35 AM
Subject: Shutdown sts 2002-10-16 08:13:33: system modifcation
Message-ID: <mailman.138.1357938604.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Oct 16 03:17:58 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Oct 16, 2002 3:17:58 PM
Subject: Shutdown sts 2002-10-16 08:13:33: system modifcation
Message-ID: <mailman.139.1357938604.25857.sts-pcs@snf.stanford.edu>

system modification complete ok to use



From jhaydon at snf.stanford.edu  Fri Oct 18 09:48:03 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Oct 18, 2002 9:48:03 AM
Subject: Comment sts 2002-10-18 09:48:03: silane nitrogen bottle chsnge on Monday
Message-ID: <mailman.140.1357938604.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Oct 21 08:34:15 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 21, 2002 8:34:15 AM
Subject: Shutdown sts 2002-10-21 08:34:14: Silane/N2 cylinder change
Message-ID: <mailman.141.1357938604.25857.sts-pcs@snf.stanford.edu>

The tool in on leak check till tomorrow am



From mdickey at snf.stanford.edu  Tue Oct 22 10:46:45 2002
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Oct 22, 2002 10:46:45 AM
Subject: Comment sts 2002-10-22 10:46:40: Bottle change
Message-ID: <mailman.142.1357938604.25857.sts-pcs@snf.stanford.edu>

N2/silane bottle has been changed, ready for test



From seymour at snf.stanford.edu  Tue Oct 22 10:52:05 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 22, 2002 10:52:05 AM
Subject: Shutdown sts 2002-10-21 08:34:14: Silane/N2 cylinder change
Message-ID: <mailman.143.1357938604.25857.sts-pcs@snf.stanford.edu>

cylinder changed leak check passed needs testing



From seymour at snf.stanford.edu  Tue Oct 22 10:52:42 2002
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Oct 22, 2002 10:52:42 AM
Subject: Shutdown sts 2002-10-22 10:52:42: needs test after cylinder change
Message-ID: <mailman.144.1357938604.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Wed Oct 23 12:00:04 2002
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Oct 23, 2002 12:00:04 PM
Subject: Comment sts 2002-10-23 12:00:03: High Frequency oxide test was good.
Message-ID: <mailman.145.1357938604.25857.sts-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Oct 23 12:01:43 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Oct 23, 2002 12:01:43 PM
Subject: Shutdown sts 2002-10-22 10:52:42: needs test after cylinder change
Message-ID: <mailman.146.1357938604.25857.sts-pcs@snf.stanford.edu>

testing complete ok to use



From mwiemer at snf.stanford.edu  Thu Oct 24 07:37:46 2002
From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu)
Date: Oct 24, 2002 7:37:46 PM
Subject: Comment sts 2002-10-24 19:37:44: pumpdown shudder
Message-ID: <mailman.147.1357938604.25857.sts-pcs@snf.stanford.edu>

When the STS PECVD pumps down the chamber, or vents, there is a shudder sound.  A shaking sound.  There are only 2 maybe 3 oscillations of the sound before it stops and continues to pumpdown or vent nicely.