From mdickey at snf.stanford.edu Fri Sep 6 07:50:41 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sep 6, 2002 7:50:41 AM Subject: Shutdown sts 2002-09-06 07:50:41: Test Message-ID: System needs test after cylinder change. 24 hour leak check passed From jperez at snf.stanford.edu Fri Sep 6 04:15:06 2002 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Sep 6, 2002 4:15:06 PM Subject: Comment sts 2002-09-06 16:15:06: Test on STS after SiH4 bottle change was good Message-ID: From jperez at snf.stanford.edu Fri Sep 6 04:15:57 2002 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Sep 6, 2002 4:15:57 PM Subject: Shutdown sts 2002-09-06 07:50:41: Test ran without an error on STS Message-ID: From rfasch at snf.stanford.edu Tue Sep 24 01:33:57 2002 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Sep 24, 2002 1:33:57 PM Subject: Shutdown sts 2002-09-24 13:33:57: gase line purge error Message-ID: From jhaydon at snf.stanford.edu Tue Sep 24 04:33:31 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sep 24, 2002 4:33:31 PM Subject: Shutdown sts 2002-09-24 13:33:57: gase line purge error Message-ID: fixed valve but problem may still exist From jhaydon at snf.stanford.edu Tue Sep 24 04:34:03 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sep 24, 2002 4:34:03 PM Subject: Problem sts 2002-09-24 16:34:02: purge error problem Message-ID: From mwiemer at snf.stanford.edu Thu Sep 26 10:56:39 2002 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Sep 26, 2002 10:56:39 AM Subject: Shutdown sts 2002-09-26 10:56:38: purge gas flow fault Message-ID: the system goes into shutdown on the purge. no processes can be run. From jhaydon at snf.stanford.edu Thu Sep 26 02:25:54 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sep 26, 2002 2:25:54 PM Subject: Shutdown sts 2002-09-26 10:56:38: purge gas flow fault Message-ID: purge flow fault seems to be software glitch should be ok to use but problem may reoccur From jhaydon at snf.stanford.edu Thu Sep 26 02:26:51 2002 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sep 26, 2002 2:26:51 PM Subject: Problem sts 2002-09-24 16:34:02: purge error problem Message-ID: purge error cleared but problem may reoccur