From sabnis at snf.stanford.edu  Fri Apr  4 03:47:58 2003
From: sabnis at snf.stanford.edu (sabnis at snf.stanford.edu)
Date: Apr 4, 2003 3:47:58 PM
Subject: Shutdown sts 2003-04-04 15:47:53: Report Shutdown for sts
Message-ID: <mailman.171.1357938604.25857.sts-pcs@snf.stanford.edu>

I tried both the standard mixed frequency nitride
and high frequency oxide recipes and found that the
automatic RF matching function is not working.  Films
can not be deposited until this gets fixed.



From cbaxter at snf.stanford.edu  Fri Apr  4 11:23:30 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 4, 2003 11:23:30 PM
Subject: Shutdown sts 2003-04-04 15:47:53: Report Clear for sts
Message-ID: <mailman.172.1357938604.25857.sts-pcs@snf.stanford.edu>

cleaned upper electrode



From cbaxter at snf.stanford.edu  Fri Apr  4 11:23:40 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 4, 2003 11:23:40 PM
Subject: Problem sts 2003-03-17 14:31:32: Report Clear for sts
Message-ID: <mailman.173.1357938604.25857.sts-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Apr  4 11:23:48 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 4, 2003 11:23:48 PM
Subject: Problem sts 2003-03-14 00:48:45: Report Clear for sts
Message-ID: <mailman.174.1357938604.25857.sts-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Fri Apr  4 11:24:01 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Apr 4, 2003 11:24:01 PM
Subject: Problem sts 2003-03-07 12:25:56: Report Clear for sts
Message-ID: <mailman.175.1357938604.25857.sts-pcs@snf.stanford.edu>




From jperez at snf.stanford.edu  Mon Apr  7 12:03:02 2003
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Apr 7, 2003 12:03:02 PM
Subject: Shutdown sts 2003-04-07 12:03:02: Report Shutdown for sts HF switching problem
Message-ID: <mailman.176.1357938604.25857.sts-pcs@snf.stanford.edu>

HF power isn't coming on automatically.  Can't run Nitride or HFoxides



From jhaydon at snf.stanford.edu  Tue Apr  8 10:27:29 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 8, 2003 10:27:29 AM
Subject: Shutdown sts 2003-04-07 12:03:02: Report Clear for sts
Message-ID: <mailman.177.1357938604.25857.sts-pcs@snf.stanford.edu>

RF working now ok to test



From jhaydon at snf.stanford.edu  Tue Apr  8 10:28:35 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 8, 2003 10:28:35 AM
Subject: Problem sts 2003-04-08 10:28:35: Report Problem for sts
Message-ID: <mailman.178.1357938604.25857.sts-pcs@snf.stanford.edu>

RF working now ok to test may have a flakey switch



From jhaydon at snf.stanford.edu  Wed Apr  9 04:03:42 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 9, 2003 4:03:42 PM
Subject: Problem sts 2003-04-08 10:28:35: Report Clear for sts
Message-ID: <mailman.179.1357938604.25857.sts-pcs@snf.stanford.edu>

ok to use but may have a flakey switch



From jperez at snf.stanford.edu  Thu Apr 10 12:33:53 2003
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Apr 10, 2003 12:33:53 PM
Subject: Shutdown sts 2003-04-10 12:33:52: Report Shutdown for sts silane bottle change
Message-ID: <mailman.180.1357938604.25857.sts-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Fri Apr 11 01:48:09 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Apr 11, 2003 1:48:09 PM
Subject: Shutdown sts 2003-04-10 12:33:52: Report Clear for sts
Message-ID: <mailman.181.1357938604.25857.sts-pcs@snf.stanford.edu>

The cylinder has been changed and leak check passed



From seymour at snf.stanford.edu  Fri Apr 11 01:48:48 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Apr 11, 2003 1:48:48 PM
Subject: Problem sts 2003-04-11 13:48:48: Report Problem for sts
Message-ID: <mailman.182.1357938604.25857.sts-pcs@snf.stanford.edu>

Needs test after silane cylinder change



From jperez at snf.stanford.edu  Mon Apr 21 08:53:44 2003
From: jperez at snf.stanford.edu (jperez at snf.stanford.edu)
Date: Apr 21, 2003 8:53:44 AM
Subject: Problem sts 2003-04-11 13:48:48: Report Clear for sts
Message-ID: <mailman.183.1357938604.25857.sts-pcs@snf.stanford.edu>

Attached a temporary nitride recipe with the results of good 
refractive index, uniformity, but still a lower dep. rate. Will
continue to work on Nitride issues.



From true at snf.stanford.edu  Wed Apr 30 03:21:11 2003
From: true at snf.stanford.edu (true at snf.stanford.edu)
Date: Apr 30, 2003 3:21:11 PM
Subject: Shutdown sts 2003-04-30 15:21:10: system will not vent properly
Message-ID: <mailman.184.1357938604.25857.sts-pcs@snf.stanford.edu>

Display stuck saying "Venting CHamber Please Wait"



From jhaydon at snf.stanford.edu  Wed Apr 30 03:42:14 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Apr 30, 2003 3:42:14 PM
Subject: Shutdown sts 2003-04-30 15:21:10: Report Clear for sts
Message-ID: <mailman.185.1357938604.25857.sts-pcs@snf.stanford.edu>

venting now probably a program glitch ok to use