Shutdown sts 2003-04-04 15:47:53: Report Shutdown for sts

sabnis at snf.stanford.edu sabnis at snf.stanford.edu
Fri Apr 4 03:47:58 PST 2003


I tried both the standard mixed frequency nitride
and high frequency oxide recipes and found that the
automatic RF matching function is not working.  Films
can not be deposited until this gets fixed.




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