Problem sts 2003-04-11 13:48:48: Report Clear for sts

jperez at snf.stanford.edu jperez at snf.stanford.edu
Mon Apr 21 08:53:44 PDT 2003


Attached a temporary nitride recipe with the results of good 
refractive index, uniformity, but still a lower dep. rate. Will
continue to work on Nitride issues.




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