From sandrews at snf.stanford.edu  Tue Jan 14 05:15:13 2003
From: sandrews at snf.stanford.edu (sandrews at snf.stanford.edu)
Date: Jan 14, 2003 5:15:13 PM
Subject: Problem sts 2003-01-14 17:15:10: Gas Flow error
Message-ID: <mailman.161.1357938604.25857.sts-pcs@snf.stanford.edu>

During two different depositions of oxide, we received a gas flow error.  Each time we resumed, but the oxides appear to be thinner than expected.



From jhaydon at snf.stanford.edu  Tue Jan 21 07:25:11 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jan 21, 2003 7:25:11 AM
Subject: Problem sts 2003-01-14 17:15:10: Gas Flow error
Message-ID: <mailman.162.1357938604.25857.sts-pcs@snf.stanford.edu>

the system has internitent gas flow errors it shuold not cause any real problems



From jhaydon at snf.stanford.edu  Tue Jan 28 07:22:39 2003
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Jan 28, 2003 7:22:39 AM
Subject: Shutdown sts 2003-01-28 07:22:38: bad element in burn box
Message-ID: <mailman.163.1357938604.25857.sts-pcs@snf.stanford.edu>