From jhaydon at snf.stanford.edu Wed Nov 5 07:22:29 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 5 Nov 2003 07:22:29 -0800 Subject: Problem sts 2003-10-29 11:15:16: Report Problem for sts Message-ID: the sts dep has ocassional faults like this it is still ok to run From jhaydon at snf.stanford.edu Wed Nov 5 07:22:48 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 5 Nov 2003 07:22:48 -0800 Subject: Problem sts 2003-10-30 13:12:42: warmup pressure tolerance error message Message-ID: From calarrudo at snf.stanford.edu Wed Nov 5 20:29:20 2003 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Wed, 5 Nov 2003 20:29:20 -0800 Subject: Shutdown sts 2003-11-05 20:29:19: Pressure tolerance error Message-ID: During etchback3 clean cycle the system kept showing a pressure tolerance error. I would push resume and the pressure tolerance error came back again and again. I talked to Caesar, he told me to shut the system down. From cbaxter at snf.stanford.edu Wed Nov 5 20:46:57 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Nov 2003 20:46:57 -0800 Subject: Shutdown sts 2003-11-05 20:29:19: Pressure tolerance error Message-ID: abort 16hrs standy. vented chamber and eric wiped down the chamber with ipa. now running o2 descum From yinliu at snf.stanford.edu Sun Nov 9 03:27:30 2003 From: yinliu at snf.stanford.edu (yinliu at snf.stanford.edu) Date: Sun, 9 Nov 2003 03:27:30 -0800 Subject: Problem sts 2003-11-09 03:27:29: STS Pressure contral problem Message-ID: During the Nitride deposition, STS showed a very high pressure (2000mt), and showed "over pressure trip". My deposition was not even started. From jhaydon at snf.stanford.edu Mon Nov 10 07:48:35 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 10 Nov 2003 07:48:35 -0800 Subject: Shutdown sts 2003-11-10 07:48:34: Message-ID: From jhaydon at snf.stanford.edu Mon Nov 10 07:49:10 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 10 Nov 2003 07:49:10 -0800 Subject: Shutdown sts 2003-11-10 07:48:34: Message-ID: From jhaydon at snf.stanford.edu Mon Nov 10 07:50:14 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 10 Nov 2003 07:50:14 -0800 Subject: Shutdown sts 2003-11-10 07:50:14: water leak Message-ID: wter leaking from connector i will need to shut it down to fix it From jperez at snf.stanford.edu Wed Nov 12 15:32:47 2003 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Wed, 12 Nov 2003 15:32:47 -0800 Subject: Shutdown sts 2003-11-10 07:50:14: water leak Message-ID: STS has been repaired. Since Jim H. had the system shut off, I've started the clean cycle. A thicknes test of oxide or nitride should be ran before committing your wafers. From jhaydon at snf.stanford.edu Thu Nov 13 08:27:43 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 13 Nov 2003 08:27:43 -0800 Subject: Problem sts 2003-11-09 03:27:29: STS Pressure contral problem Message-ID: The sts dep has occasional glitches like over pressure faults but you should be able to continue From mdickey at snf.stanford.edu Thu Nov 13 08:51:47 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 13 Nov 2003 08:51:47 -0800 Subject: Comment sts 2003-11-13 08:51:44: Report Comment for sts Message-ID: STS DEP will be down for gas bottle change on monday thru tuesday morning From jperez at snf.stanford.edu Fri Nov 14 08:52:15 2003 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 14 Nov 2003 08:52:15 -0800 Subject: Problem sts 2003-11-14 08:52:13: STS in Clean Cycle - 4.4um of thickness Message-ID: From seymour at snf.stanford.edu Mon Nov 17 08:04:01 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Nov 2003 08:04:01 -0800 Subject: Comment sts 2003-11-13 08:51:44: Report Comment for sts Message-ID: Leak check started From seymour at snf.stanford.edu Mon Nov 17 08:06:25 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Nov 2003 08:06:25 -0800 Subject: Problem sts 2003-11-14 08:52:13: STS in Clean Cycle - 4.4um of thickness Message-ID: From seymour at snf.stanford.edu Mon Nov 17 08:07:17 2003 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 17 Nov 2003 08:07:17 -0800 Subject: Shutdown sts 2003-11-17 08:07:16: Silane cylinder change Message-ID: Cylinder changed and leak check started. From mdickey at snf.stanford.edu Tue Nov 18 07:46:26 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 18 Nov 2003 07:46:26 -0800 Subject: Shutdown sts 2003-11-17 08:07:16: Silane cylinder change Message-ID: Bottle changed. Back on line From mdickey at snf.stanford.edu Tue Nov 18 07:47:04 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 18 Nov 2003 07:47:04 -0800 Subject: Comment sts 2003-11-18 07:47:03: Bottle change Message-ID: Bottle has been changed. Needs test From quickwin at snf.stanford.edu Thu Nov 20 17:29:14 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Thu, 20 Nov 2003 17:29:14 -0800 Subject: Problem sts 2003-11-20 17:29:14: "Pressure tolerance error" Message-ID: I had this error message for four times for a total time of 1 hour wasted. Did not get any film deposited in the end. From jhaydon at snf.stanford.edu Fri Nov 21 06:39:51 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 21 Nov 2003 06:39:51 -0800 Subject: Comment sts 2003-11-18 07:47:03: Bottle change Message-ID: bottle change completed ok to use From jperez at snf.stanford.edu Mon Nov 24 10:04:10 2003 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 24 Nov 2003 10:04:10 -0800 Subject: Problem sts 2003-11-20 17:29:14: "Pressure tolerance error" Message-ID: I got the same error running a Nitride recipe during step 1 "warmup" (N2 ). The chamber setpoint is 500 mT and the output (actual) was 350 mtorr. I adjusted the N2 flowmeter in front, by the Argon toggle switch. Please check your recipes when receiving errors. From crichter at snf.stanford.edu Mon Nov 24 10:06:28 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 24 Nov 2003 10:06:28 -0800 Subject: Problem sts 2003-11-24 10:06:27: nitrogen air gun leak Message-ID: nitrogen is leaking out from the 'trigger' part of the gun