Shutdown sts 2003-11-05 20:29:19: Pressure tolerance error

calarrudo at calarrudo at
Wed Nov 5 20:29:20 PST 2003

During etchback3 clean cycle the system kept showing a pressure tolerance error.  I would push resume and the pressure tolerance error came back again and again.  I talked to Caesar, he told me to shut the system down.

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