Shutdown sts 2003-11-05 20:29:19: Pressure tolerance error

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Wed Nov 5 20:29:20 PST 2003


During etchback3 clean cycle the system kept showing a pressure tolerance error.  I would push resume and the pressure tolerance error came back again and again.  I talked to Caesar, he told me to shut the system down.




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