Problem sts 2003-11-09 03:27:29: STS Pressure contral problem

yinliu at snf.stanford.edu yinliu at snf.stanford.edu
Sun Nov 9 03:27:30 PST 2003


During the Nitride deposition, STS showed a very high pressure (2000mt), and showed "over pressure trip".  My deposition was not even started.




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