From mdickey at snf.stanford.edu Wed Oct 1 08:03:04 2003 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Oct 1, 2003 8:03:04 AM Subject: Shutdown sts 2003-09-30 07:45:01: Report Clear for sts Message-ID: Bottle change is done. 24 hour leak check passed. Ready for test From yuchen at snf.stanford.edu Mon Oct 13 11:57:14 2003 From: yuchen at snf.stanford.edu (yuchen at snf.stanford.edu) Date: Oct 13, 2003 11:57:14 AM Subject: Problem sts 2003-10-13 11:57:12: Report Problem for sts Message-ID: The pressure drops during the deposition. And the machhine shows "pressure tolerance error", has to press F2 to resume the process. Happened a couple of times. From sandrews at snf.stanford.edu Mon Oct 13 01:13:04 2003 From: sandrews at snf.stanford.edu (sandrews at snf.stanford.edu) Date: Oct 13, 2003 1:13:04 PM Subject: Shutdown sts 2003-10-13 13:13:03: Report Shutdown for sts Message-ID: Purge Gas Flow Fault. I can't get my sample out. From jperez at snf.stanford.edu Mon Oct 13 02:03:44 2003 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Oct 13, 2003 2:03:44 PM Subject: Shutdown sts 2003-10-13 13:13:03: Report Clear for sts Message-ID: Need to follow instructions to complete purge gas cycle From jperez at snf.stanford.edu Mon Oct 13 02:04:59 2003 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Oct 13, 2003 2:04:59 PM Subject: Problem sts 2003-10-13 11:57:12: Report Clear for sts Message-ID: Press resume to complete cycle.. From uli at snf.stanford.edu Mon Oct 20 03:33:31 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Oct 20, 2003 3:33:31 PM Subject: Comment sts 2003-10-20 15:33:30: Report Comment for sts Message-ID: test From uli at snf.stanford.edu Mon Oct 20 03:48:02 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Oct 20, 2003 3:48:02 PM Subject: Comment sts 2003-10-20 15:48:02: Report Comment for sts Message-ID: test sorry users From zheng at snf.stanford.edu Thu Oct 23 12:12:33 2003 From: zheng at snf.stanford.edu (zheng at snf.stanford.edu) Date: Thu, 23 Oct 2003 12:12:33 -0700 Subject: Comment sts 2003-10-23 12:12:33: Report Comment for sts Message-ID: Forgot to remob\ve vinyl gloves when unloading wafers. Burned the vinyl glove onto the platen. I put the chamber into etchback3 clean cycle. From calarrudo at snf.stanford.edu Thu Oct 23 12:19:50 2003 From: calarrudo at snf.stanford.edu (calarrudo at snf.stanford.edu) Date: Thu, 23 Oct 2003 12:19:50 -0700 Subject: Comment sts 2003-10-23 12:19:49: Report Comment for sts Message-ID: I forgot to take vynl gloves off when using the STS. I burned the platen with the platen with the vinyl glove unloading wafers after the deposition. I put the STS in Etchback 3 clean cycle. From crichter at snf.stanford.edu Tue Oct 28 13:46:44 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Tue, 28 Oct 2003 13:46:44 -0800 Subject: Problem sts 2003-10-28 13:46:43: Purge Gas Flow Fault System Error Message-ID: tried to purge for last 25 minutes From jhaydon at snf.stanford.edu Tue Oct 28 14:00:45 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 28 Oct 2003 14:00:45 -0800 Subject: Problem sts 2003-10-28 13:46:43: Report Clear for sts Message-ID: From jhaydon at snf.stanford.edu Tue Oct 28 14:00:59 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 28 Oct 2003 14:00:59 -0800 Subject: Comment sts 2003-10-23 12:19:49: Report Clear for sts Message-ID: From jhaydon at snf.stanford.edu Tue Oct 28 14:01:27 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 28 Oct 2003 14:01:27 -0800 Subject: Comment sts 2003-10-23 12:12:33: Report Clear for sts Message-ID: From sandrews at snf.stanford.edu Wed Oct 29 11:15:17 2003 From: sandrews at snf.stanford.edu (sandrews at snf.stanford.edu) Date: Wed, 29 Oct 2003 11:15:17 -0800 Subject: Problem sts 2003-10-29 11:15:16: Report Problem for sts Message-ID: There was a gas purge error as I closed the system down From crichter at snf.stanford.edu Thu Oct 30 13:12:43 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 30 Oct 2003 13:12:43 -0800 Subject: Problem sts 2003-10-30 13:12:42: warmup pressure tolerance error message Message-ID: