Problem sts 2003-10-13 11:57:12: Report Problem for sts

yuchen at snf.stanford.edu yuchen at snf.stanford.edu
Mon Oct 13 11:57:14 PDT 2003


The pressure drops during the deposition.  And the machhine shows "pressure tolerance error", has to press F2 to resume the process.  Happened a couple of times.




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