Comment sts 2003-10-23 12:12:33: Report Comment for sts

zheng at snf.stanford.edu zheng at snf.stanford.edu
Thu Oct 23 12:12:33 PDT 2003


Forgot to remob\ve vinyl gloves when unloading wafers.  Burned the vinyl glove onto the platen.  I put the chamber into etchback3 clean cycle.




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