Comment sts 2003-10-23 12:12:33: Report Comment for sts
zheng at snf.stanford.edu
zheng at snf.stanford.edu
Thu Oct 23 12:12:33 PDT 2003
Forgot to remob\ve vinyl gloves when unloading wafers. Burned the vinyl glove onto the platen. I put the chamber into etchback3 clean cycle.
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