Comment sts 2003-10-23 12:19:49: Report Comment for sts

calarrudo at snf.stanford.edu calarrudo at snf.stanford.edu
Thu Oct 23 12:19:50 PDT 2003


I forgot to take vynl gloves off when using the STS.  I burned the platen with the platen with the vinyl glove unloading wafers after the deposition.  I put the STS in Etchback 3 clean cycle.




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