From jperez at snf.stanford.edu Tue Apr 6 16:03:55 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 6 Apr 2004 16:03:55 -0700 Subject: Problem sts 2004-04-06 16:03:54: Down for chamber clean Message-ID: From jperez at snf.stanford.edu Thu Apr 8 10:17:47 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Thu, 8 Apr 2004 10:17:47 -0700 Subject: Problem sts 2004-04-06 16:03:54: Down for chamber clean Message-ID: Clean Cycle completed. From jperez at snf.stanford.edu Mon Apr 19 14:43:01 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Mon, 19 Apr 2004 14:43:01 -0700 Subject: Comment sts 2004-04-19 14:42:58: System in Clean cycle Message-ID: From vossough at snf.stanford.edu Tue Apr 20 00:05:27 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Tue, 20 Apr 2004 00:05:27 -0700 Subject: Shutdown sts 2004-04-20 00:05:26: Over pressure trip Message-ID: After cleaning, placed wafer inside for 1000A oxide dep. displayed error: "Over pressure trip" From vossough at snf.stanford.edu Tue Apr 20 00:05:46 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Tue, 20 Apr 2004 00:05:46 -0700 Subject: Problem sts 2004-04-20 00:05:45: wafer inside Message-ID: From jperez at snf.stanford.edu Tue Apr 20 13:56:26 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 20 Apr 2004 13:56:26 -0700 Subject: Comment sts 2004-04-19 14:42:58: System in Clean cycle Message-ID: Clean cycle completed From jperez at snf.stanford.edu Tue Apr 20 14:02:32 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 20 Apr 2004 14:02:32 -0700 Subject: Problem sts 2004-04-20 00:05:45: wafer inside Message-ID: Removed wafer, sitting on top of STS From jperez at snf.stanford.edu Tue Apr 20 14:03:27 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Tue, 20 Apr 2004 14:03:27 -0700 Subject: Shutdown sts 2004-04-20 00:05:26: Over pressure trip Message-ID: Pump in basement was off, ran one recipe without an error of overpressure trip. From vossough at snf.stanford.edu Fri Apr 23 01:26:02 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Fri, 23 Apr 2004 01:26:02 -0700 Subject: Shutdown sts 2004-04-23 01:26:01: "over pressure trip" Message-ID: The message ;"over pressure trip" poped again at the begining of the run. Hit "abort" key a couple of times (cycles) in order to open the chamber and retrieve my wafer. Also, noticed the chamber needed wiping. While reaching in towipe the inside, the emergency botton was pushed. Turned the system back on again (no problerm here). From jperez at snf.stanford.edu Fri Apr 23 08:50:36 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 23 Apr 2004 08:50:36 -0700 Subject: Shutdown sts 2004-04-23 01:26:01: "over pressure trip" Message-ID: Pump in the basement turned back on. From mwiemer at snf.stanford.edu Sun Apr 25 15:37:40 2004 From: mwiemer at snf.stanford.edu (mwiemer at snf.stanford.edu) Date: Sun, 25 Apr 2004 15:37:40 -0700 Subject: Problem sts 2004-04-25 15:37:39: problem Message-ID: I was just about to use the STS but it is wierd. The temperature is 20deg, but the plant is on. The chamber pressure says that it is 2000mT, but the valve between the pump and chamber is closed. Since I dont know what is going on, and obviously the last user did not write anything up, Im not putting this on shutdown. But something is very wrong. -Mike From jhaydon at snf.stanford.edu Tue Apr 27 06:21:19 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 27 Apr 2004 06:21:19 -0700 Subject: Problem sts 2004-04-25 15:37:39: problem Message-ID: system was probably not properly reset From chion at snf.stanford.edu Tue Apr 27 17:23:28 2004 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: Tue, 27 Apr 2004 17:23:28 -0700 Subject: Problem sts 2004-04-27 17:23:27: No plasma during HF SiO2 dep Message-ID: ..reflected power was as high as 51W... From jperez at snf.stanford.edu Fri Apr 30 08:08:15 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 30 Apr 2004 08:08:15 -0700 Subject: Problem sts 2004-04-27 17:23:27: No plasma during HF SiO2 dep Message-ID: I RAN TWO PASSES OF NITRIDE AND OXIDE AND DIDN'T EXPERIENCE A PROBLEM WITH POWER OR PLASMA. From jperez at snf.stanford.edu Fri Apr 30 08:09:02 2004 From: jperez at snf.stanford.edu (jperez at snf.stanford.edu) Date: Fri, 30 Apr 2004 08:09:02 -0700 Subject: Shutdown sts 2004-04-30 08:09:01: GAS bottle change, silane Message-ID: From seymour at snf.stanford.edu Fri Apr 30 08:53:15 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 30 Apr 2004 08:53:15 -0700 Subject: Comment sts 2004-04-30 08:53:14: Silane/N2 cylinder change Message-ID: The cylinder has been changed and is now on leak test.